High-performance a-IGZO TFT fabricated with ultralow thermal budget via microwave annealing
Published in IEEE Transactions on Electron Devices, 2021
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Recommended citation: Tiantian Pi, Dongqi Xiao, Hui Yang, Gang He, Xiaohan Wu, Wenjun Liu, David Zhang, Shi-Jin Ding, "High-performance a-IGZO TFT fabricated with ultralow thermal budget via microwave annealing." IEEE Transactions on Electron Devices, 2021.